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Semiconductor Factory
RSTEC Semiconductor

Factories with vast areas, featuring high-energy-consuming equipment and scattered low-energy devices, face increasing pressure from stricter ESG requirements. Simply focusing on cost control is no longer enough. A comprehensive plan to improve energy efficiency and operational effectiveness is essential.

Solution

The modular architecture of eKoEN energy management services and its uninterrupted hardware setup ensure that production lines can continue operating during installation. It also offers on-site deployment services, fully aligning with the stringent cybersecurity requirements of semiconductor plants. This optimizes the process of integrating energy management services within the facilities, supporting the achievement of sustainable development goals in semiconductor manufacturing.

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無人機控制中心

Real-Time Data Monitoring and Analysis

eKoEN provides round-the-clock energy consumption monitoring, enabling semiconductor plant managers to track the energy usage of each piece of equipment in real-time. For high-energy-consuming equipment used in semiconductor production—such as chemical mechanical polishers, cleanroom HVAC systems, and wafer cleaning machines—real-time monitoring helps identify potential energy waste issues and allows for precise adjustments, reducing unnecessary energy consumption.

Benefits

  • Real-time monitoring of high-power equipment to quickly detect abnormalities and minimize energy waste.

  • Lower operational costs, improve equipment efficiency, and ensure production process stability.

Equipment Anomaly Monitoring and Real-Time Alerts

The eKoEN energy management system monitors critical semiconductor equipment like photolithography machines, etching systems, and cleaning systems. It detects abnormalities (e.g., excess energy use or irregular temperatures) and sends instant alerts, enabling prompt issue resolution to prevent failures and energy waste.

Benefits

  • Rapid detection of equipment anomalies, reducing downtime and maintenance costs while ensuring efficient production line operations.

  • Prolonged equipment lifespan, reduced failure risks, and improved overall production efficiency.

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Predictive Maintenance and Equipment Performance Optimization

The eKoEN energy management system leverages operational data to forecast equipment maintenance needs, enabling predictive maintenance. For critical semiconductor manufacturing equipment, the system uses data analysis to predict potential failures in advance, avoiding unexpected downtime and excessive energy consumption.

Benefits

  • Early identification of maintenance requirements, minimizing the risk of sudden failures.

  • Extended equipment lifespan, reduced maintenance costs, and sustained production capacity stability.

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